Production scheduling of a MEMS manufacturing system with a wafer bonding process

Journal of Manufacturing Systems

Volumn 21, Issue 4, 2002, Pages 287-301

  Tay, Francis E H ^b   Lee, Loo Hay ^b   Wang, Lixin ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NONE

Author keywords

Microelectromechanical Systems (MEMS); Scheduling; Simulation; Synchronization

Indexed keywords

EID: 0040675382     PISSN: 02786125     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0278-6125(02)80168-6     Document Type: Article

References (16)

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