Facet generation during molecular beam epitaxy of GaAs/AlGaAs multilayers on GaAs (001) patterned substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2731-2738

  Takebe, T ^a  

^a ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040465683     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589011     Document Type: Article

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