Facet generation during molecular beam epitaxy of GaAs/AlGaAs multilayers on GaAs (111) a patterned substrates

Journal of Crystal Growth

Volumn 162, Issue 1-2, 1996, Pages 31-42

  Takebe, T ^a,b   Fujii, M ^a,c   Yamamoto, T ^a,d   Fujita, K ^a   Kobayashi, K ^a,e   Watanabe, T ^a  

^a ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

^b SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

^c Design Technology Division   (Japan)

^d Technical Administration Division   (Japan)

^e NHK SCIENCE AND TECHNICAL RESEARCH LABORATORIES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYERS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH; SUBSTRATES;

ALUMINUM GALLIUM ARSENIDE; FACET GENERATION; PATTERNED SUBSTRATES;

MOLECULAR BEAM EPITAXY;

EID: 0030563129     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-0248(95)00946-9     Document Type: Article

References (40)

1. W.T. Tsang and A.Y. Cho, Appl. Phys. Lett. 30 (1977) 293.
2. J.S. Smith, P.L. Deny, S. Margalit and A. Yariv, Appl. Phys. Lett. 47 (1985) 712.
3. T. Yuasa, M. Manno, T. Yamada, S. Narituka, K. Shinozaki and M. Ishii, J. Appl. Phys. 62 (1987) 764.
4. H.P. Meier, R.F. Broom, P.W. Epperlein, E. van Gieson, Ch. Harder, H. Jäckel, W. Walter and D.J. Webb, J. Vac. Sci. Technol. B 6 (1987) 692.
5. H.P. Meier, E. van Gieson, R.F. Broom, W. Walter, D.J. Webb, C. Harder and H. Jäckel, Inst. Phys. Conf. Ser. 91 (1988) 609.
6. Y. Nakamura, S. Koshiba, M. Tsuchiya, H. Kano and H. Sakaki, Appl. Phys. Lett. 59 (1991) 700.
7. S. Shimomura, S. Ohkubo, Y. Yuba, S. Hiyamizu, M. Shigeta, T. Yamamoto and K. Kobayashi, Surf. Sci. 267 (1992) 13.
8. Y. Morishita, Y. Nomura, S. Goto, Y. Katayama and T. Isu, Inst. Phys. Conf. Ser. 120 (1992) 19.
9. M. López, T. Ishikawa and Y. Nomura, Jpn. J. Appl. Phys. 32 (1993) L1051.
10. Y. Liu, S. Shimomura, N. Sano, K. Gamo, A. Adachi and S. Hiyamizu, Semicond. Sci. Technol. 8 (1993) 2197.
11. K. Eberl, P. Grambow, A. Lehmann, A. Kurtenbach, K. von Klitzing, D. Heitmann, M. Dilger and M. Hohenstein, Appl. Phys. Lett. 63 (1993) 1059.
12. X.Q. Shen, M. Tanaka, K. Wada and T. Nishinaga, J. Crystal Growth 135 (1994) 85.
13. T. Takamori and T. Kamijo, Appl. Phys. Lett. 77 (1995) 187.
14. Y. Kadoya, A. Sato, H. Kano and H. Sakaki, J. Crystal Growth 111 (1991) 280.
15. M.R. Fahy, J.H. Neave, M.J. Ashwin, R. Murray, R.C. Nawman, B.A. Joyce, Y. Kadoya and H. Sakaki, J. Crystal Growth 127 (1993) 871.
16. D.A. Woolf, J.P. Williams, D.I. Westwood, Z. Sobiesierski, J.E. Aubrey and R.H. Williams, J. Crystal Growth 127 (1993) 913.
17. M.R. Fahy, K. Sato and B.A. Joyce, Appl. Phys. Lett. 64 (1994) 190.
18. K. Sato, M.R. Fahy and B.A. Joyce, Jpn. J. Appl. Phys. 33 (1994) L905.
19. Y. Okano, H. Seto, H. Katahama, S. Nishine, I. Fujimoto and T. Suzuki, Jpn. J. Appl. Phys. 28 (1989) L151.
20. Y. Okano, M. Shigeta, H. Seto, H. Katahama, S. Nishine and I. Fujimoto, Jpn. J. Appl. Phys. 29 (1990) L1357.
21. M. Shigeta, Y. Okano, H. Seto, H. Katahama, S. Nishine, K. Kobayashi and I. Fujimoto, J. Crystal Growth 111 (1991) 284.
22. T. Yamamoto, M. Fujii, T. Takebe, D. Lovell and K. Kobayashi, Inst. Phys. Conf. Ser. 120 (1992) 31.
23. M. Fujii, T. Yamamoto, M. Shigeta, T. Takebe, K. Kobayashi, S. Hiyamizu and I. Fujimoto, Surf. Sci. 267 (1992) 26.
24. M. Fujii, T. Takebe, T. Yamamoto, M. Inai and K. Kobayashi, Superlattices Microstructures 12 (1992) 167.
25. K. Kobayashi, T. Takebe, T. Yamamoto, M. Fujii, M. Inai and D. Lovell, J. Electron. Mater. 22 (1993) 161.
26. T. Yamamoto, M. Inai, T. Takebe, M. Fujii and K. Kobayashi, J. Crystal Growth 127 (1993) 865.
27. A. Shinoda, T. Yamamoto, M. Inai, T. Takebe, M. Fujii and K. Kobayashi, Inst. Phys. Conf. Ser. 129 (1993) 495.
28. T. Yamamoto, M. Inai, T. Takebe and T. Watanabe, J. Vac. Sci. Technol. A 11 (1993) 631.
29. M. Inai, T. Yamamoto, M. Fujii, T. Takebe and K. Kobayashi, Jpn. J. Appl. Phys. 32 (1993) 523.
30. T. Yamamoto, M. Inai, T. Takebe and T. Watanabe, Jpn. J. Appl. Phys. 32 (1993) L28.
31. T. Takebe, T. Yamamoto, M. Fujii and K. Kobayashi, J. Electrochem. Soc. 140 (1993) 1169.
32. M. Sato, K. Maehashi, H. Asahi, S. Hasegawa and H. Nakashima, Superlattices Microstructures 7 (1990) 279.
33. S. Hasegawa, K. Kimura, M. Sato, K. Maehashi and H. Nakashima, Surf. Sci. 267 (1992) 5.
34. K. Inoue, K. Kimura, K. Maehashi, S. Hasegawa and H. Nakashima, J. Crystal Growth 127 (1993) 1041.
35. T. Takebe, M. Fujii, T. Yamamoto, K. Fujita and T. Watanabe, in preparation.
36. J.M. Ballingall and C.E.C. Wood, Appl. Phys. Lett. 41 (1982) 947.
37. W.I. Wang, J. Vac. Sci. Technol. B 1 (1983) 630.
38. L.T. Parechanian, E.R. Weber and T.L. Hierl, Mater. Res. Soc. Symp. Proc. 46 (1985) 391.
39. P.N. Uppal, J.S. Aheam and D.P. Musser, J. Appl. Phys. 62 (1987) 3766.
40. M. Inai, T. Yamamoto, M. Fujii, D. Lovell, T. Takebe and K. Kobayashi, unpublished.