Self-calibration in two dimensions: the experiment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 130-146

  Takac, Michael T ^a   Ye, Jun ^a   Raugh, Michael R ^a   Pease, R Fabian W ^a   Berglund, C Neil ^a   Owen, Geraint ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

2D CALIBRATION; SELF-CALIBRATION;

ALGORITHMS; CALIBRATION; PRECISION ENGINEERING; STANDARDS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029749716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)