An analysis of flow, temperature, and chemical composition distortion in gas sampling through an orifice during chemical vapor deposition

Physics of Fluids

Volumn 11, Issue 4, 1999, Pages 821-832

  Swihart, Mark T ^a,b   Girshick, Steven L ^a  

^a University of Minnesota   (United States)

^b the State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040016437     PISSN: 10706631     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.869954     Document Type: Article

References (37)

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