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Volumn 28, Issue 8, 1998, Pages 667-669
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Excimer KrF laser with He buffer gas, 0.8 J energy, and 2% efficiency
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0040005829
PISSN: 10637818
EISSN: None
Source Type: Journal
DOI: 10.1070/QE1998v028n08ABEH001202 Document Type: Article |
Times cited : (11)
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References (15)
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