Effects of electroplated Cu thickness and polyimide plasma treatment conditions on the interfacial fracture mechanics parameters in the Cu/Cr/polyimide system

Metals and Materials International

Volumn 7, Issue 2, 2001, Pages 123-131

  Park, Young Bae ^a   Yu, Jin ^b  

^a Hynix Semiconductor Inc   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cu film; Interfacial fracture energy; Peel test; Phase angle; Polyimide

Indexed keywords

FILM THICKNESS; FRACTURE ENERGY; METALLIC FILMS; PLASMA APPLICATIONS;

CU FILMS; ELASTO-PLASTIC FINITE ELEMENT ANALYSIS; FOUNDATION MODELING; INTERFACIAL FRACTURE ENERGY; INTERFACIAL FRACTURE MECHANICS; PEEL TESTS; PHASE ANGLES; THEORETICAL METHODS;

POLYIMIDES;

EID: 0039842082     PISSN: 12259438     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf03026950     Document Type: Article

References (24)

1. I. S. Park and J. Yu, Acta mater. 46, 2947 (1998).
2. A. K. Moidu, A. N. Sinclair and J. K. Spelt, J. Testing Eval. 23, 241 (1995).
3. A. K. Moidu, A. N. Sinclair and J. K. Spelt, J. Testing Eval. 26, 247 (1998).
4. K. S. Kim and N. Aravas, Int. J. Solids Struct. 24, 417 (1988).
5. A. J. Kinloch, C. C. Lau and J. G. Williams, Int. J. Fract. 66, 45 (1994).
6. A. Bagchi and A. G. Evans, Interface Science 3, 169 (1996).
7. K. S. Kim and J. Kim, J. Eng. Mater. Tech. 110, 266 (1988).
8. N. Aravas, K. S. Kim and M. J. Loukis, Mater. Sci. Eng. A 107, 159 (1989).
9. G. J. Spies, J. Aircraft Eng. 25, 64 (1953).
10. M. F. Kanninen, Int. J. Fract. 9, 83 (1973).
11. G. Fernlund and J. K. Spelt, J. Comp. Tech. Res. 16, 234 (1994).
12. M. D. Thouless and H. M. Jensen, J. Adhesion 38, 185 (1992).
13. Z. Suo and J. W. Hutchinson, Int. J. Fract. 43, 1 (1990).
14. Y. B. Park, Ph. D. Thesis, KAIST (1999).
15. Suo and J. W. Hutchinson, Mater. Sci. Eng. A 107, 135 (1989).
16. P. Gu, J. Appl. Mech. 60, 1052 (1993).
17. J. R. Rice, J. Appl. Mech. 55, 98 (1988).
18. J. Dundurs, J. Appl. Mech. 36, 650 (1969).
19. H. C. Cao and A. G. Evans, Mech. Mater. 7, 295 (1989).
20. K. L. Mittal, POLYIMIDES; Synthesis, Characterization Applications (1984).
21. N. A. Fleck, J. W. Hutchinson and Z. Suo, Int. J. Solids Struct. 27, 1683 (1991).
22. ABAQUS User's Manual, Ver. 5.7, HKS Inc.
23. N. J. Chou and C. H. Tang, J. Vac. Sci. Tech. A 2, 751 (1984).
24. E. C. Ahn, J. Yu and I. S. Park, J. Mater. Sci. 7, 175 (1996).