High-speed convolution system for real-time proximity effect correction

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 6779-6784

  Oogi, Susumu ^a   Ishimura, Takiji ^a   Kamikubo, Takashi ^a   Shimizu, Mitsuko ^a   Hattori, Yoshiaki ^a   Iijima, Tomohiro ^a   Anze, Hirohito ^a   Abe, Takayuki ^a   Tojo, Toru ^b   Takigawa, Tadahiro ^a  

^a TOSHIBA CORPORATION   (Japan)

^b Toshiba Machine Co Ltd   (Japan)

Author keywords

Convolution; Electron beam system; Look up table; Parallel processing; Proximity effect correction; Representative figure

Indexed keywords

EID: 0039819121     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.6779     Document Type: Article

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