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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 198-201

Thin film interference effects in an off-axis illumination system

(2) Azuma, T a,b Sato, T a,b

a IBM (United States)

b TOSHIBA CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039627711 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.589264 Document Type: Article

Times cited : (3)

References (13)

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7
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