Exploiting structure in positioning of nonsymmetric signals

ICASSP, IEEE International Conference on Acoustics, Speech and Signal Processing - Proceedings

Volumn 4, Issue , 1998, Pages 1913-1916

  Ghazanfarian, A A ^a   Chen, X ^a   Kailath, T ^a   McCord, M A ^a   Pease, R F W ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE MEASUREMENT; ALIGNMENT ALGORITHMS; ALIGNMENT ERROR; ALIGNMENT SIGNALS; NONSYMMETRIC; PROCESSING STEPS; SUBSPACE DECOMPOSITION;

ALGORITHMS;

SIGNAL PROCESSING;

EID: 0031643825     PISSN: 15206149     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICASSP.1998.681436     Document Type: Conference Paper

References (4)

1. Gallatin G. Alignment Signal Generation and Analysis. Short Course notes, SPIE conference on Microlithography, CA, 1995.
2. Dirksen P., Juffermans C, Leeuwestein A., Mutsaers C, Nuijs A., Pellens R., Wolters R., Gemen J., "Effect of processing on the overlay performance of a wafer stepper". Proceedings of SPIE conference on Microlithography, CA, 1997.
3. Goodman J., Statistical Optics. John wiley &Sons, 1985.
4. Golub G.H., Van Loan C.F., Matrix Computations, John Hopkins University Press, MD, 1984.