Molecular effect in the implantation of light ions in semiconductors

Semiconductors

Volumn 31, Issue 10, 1997, Pages 999-1002

  Abroyan, I A ^a   Nikulina, L M ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038924647     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1187012     Document Type: Article

References (20)

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