Synthesis of cubic boron nitride thin films by low-energy ion beam assisted deposition by applying substrate bias

Metals and Materials International

Volumn 5, Issue 4, 1999, Pages 381-387

  Park, Young Joon ^a   Baik, Young Joon ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

Cubic boron nitride; Ion beam assisted deposition; Substrate bias

Indexed keywords

BORON NITRIDE; CUBIC BORON NITRIDE; III-V SEMICONDUCTORS; ION BEAMS; IONS; SUBSTRATES; SUPERCONDUCTING FILMS; THIN FILMS;

BORON NITRIDE THIN FILMS; CUBIC BORON NITRIDE (CBN); HEXAGONAL BORON NITRIDE (H-BN); INTERMEDIATE TEMPERATURES; LOW ENERGY ION BEAM; STOICHIOMETRIC FILMS; SUBSTRATE BIAS; SUBSTRATE TEMPERATURE;

ION BEAM ASSISTED DEPOSITION;

EID: 0038853072     PISSN: 12259438     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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