A concept for the design of novel superhard coatings

Thin Solid Films

Volumn 268, Issue 1-2, 1995, Pages 64-71

  Veprek S ^a   Reiprich, S ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Hardness; Nanostructures; Silicon nitride; Titanium nitride

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; COMPOSITE MATERIALS; ELASTIC MODULI; HARDNESS; HETEROJUNCTIONS; NANOSTRUCTURED MATERIALS; SILICON NITRIDE; STRENGTH OF MATERIALS; TITANIUM NITRIDE; TRIBOLOGY;

SUPERHARD COATINGS; VICKERS HARDNESS;

PROTECTIVE COATINGS;

EID: 0029407730     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)06695-0     Document Type: Article

References (71)

1. Titanium aluminum nitride films: A new alternative to TiN coatings
2. In Situ Xps Studies of the Deposition of Thin Films from Tetrakis(Dimethylamido)Titaniumorganometaluc Precursor for Diffusion Barriers
3. Development of plasma CVD and feasibility study of boron carbide in-situ coatings for tokamaks
4. Microhardness of a Fine-Grain-Size Al2O3
5. Properties of hard tungsten films prepared by sputtering
6. Strength enhancement in thin-layered Al-Cu laminates
7. Retardation of Dislocation Generation and Motion in Thin-Layered Metal Laminates
8. Deposition and properties of polycrystalline TiN/NbN superlattice coatings
9. Effect of screening singularities on the elastic constants of composition-modulated alloys
10. Hardening by spinodal decomposition
11. Structurally induced supermodulus effect in superlattices
12. A thermodynamic criterion of the crystalline-to-amorphous transition in silicon
13. Phase chemistry in the Ti-Si-N system: Thermochemical review with phase stability diagrams
14. Superhard nanocrystalline composite materials: The TiN/Si3N4 system
15. Statistical Model of Chemical Reactions in Nonisothermal Low Pressure Plasma
16. Use of multilayer techniques for XPS identification of various nitrogen environments in the Si/NH3 system
17. X-ray line broadening from filed aluminium and wolfram
18. Structural Studies on the Titanium-Nitrogen System.
19. Lattice parameter of the non-stoichiometric compound TiNx
20. The Hardness and Elastic Modulus of TiN Films as Determined by Ultra-Low Load Indentation
21. Microstructure of Si3N4-TiN composites prepared by chemical-vapour deposition