Antenna configuration for uniform large-area inductively coupled plasma production

Applied Physics Letters

Volumn 77, Issue 4, 2000, Pages 492-494

  Kim, S S ^a   Chang, H Y ^a   Chang, C S ^a   Yoon, N S ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chungbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038817713     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.127021     Document Type: Article

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