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Volumn 169-170, Issue , 2003, Pages 215-218
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Computer simulation of thin film growth with defect formation
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Author keywords
Growth models; Monte Carlo simulation; Roughness; Vacancies
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Indexed keywords
DEFECTS;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
THIN FILMS;
THIN FILM GROWTH;
FILM GROWTH;
COATING;
COMPUTER SIMULATOR;
FILM;
MONTE CARLO SIMULATION;
ROUGHNESS;
SURFACE TREATMENT;
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EID: 0038807675
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(03)00082-3 Document Type: Article |
Times cited : (11)
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References (7)
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