Optimization of flux ratio of C60 molecule to Ar cluster ion for diamond-like carbon film deposition by NEXAFS measurement

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 893-897

  Miyauchi, K ^a   Kitagawa, T ^a,b   Toyoda, N ^a   Matsui, S ^a   Mochiji, K ^a   Mitamura, T ^a   Yamada, I ^a,c  

^a UNIVERSITY OF HYOGO   (Japan)

^b Nomura Plating Co Ltd   (Japan)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster ion beam; Diamond like carbon; NEXAFS

Indexed keywords

ARGON; FULLERENES; ION BEAM ASSISTED DEPOSITION; ION BEAMS; RAMAN SPECTROSCOPY;

FLUX RATIO;

DIAMOND LIKE CARBON FILMS;

EID: 0038750884     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00893-0     Document Type: Conference Paper

References (8)

1. Yamada I., Kitagawa T., Matsuo J., Kirkpatrick A. Mass. Char. Trans. Inorg. Mater. B. 2000;957.
2. Kanda K., Kitagawa T., Shimizugawa Y., Haruyama Y., Matsui S., Terasawa M., Tsubakino H., Yamada I., Gejo T., Kamada M. Jpn. J. Appl. Phys. 41:2002;4295.
3. Toyoda N., Saito M., Hagiwara N., Aoki T., Matsuo J., Yamada I. Mater. Chem. Phys. 54:1998;262.
4. Hiraya A., Nakamura E., Hasumoto M., Kinoshita T., Sakai K., Ishiguro E., Watanabe M. Rev. Sci. Instr. 66:1995;2104.
5. Yoshikawa M., Iwagami K. J. Surf. Finish. Soc. Jpn. 49:1998;750.
6. Lenardi C., Piseri P., Briois V., Bottani C.E., Li Bassi A., Milani P. J. Appl. Phys. 85:1999;7159.
7. Batson P.E. Phys. Rev. B. 48:1993;2608.
8. Morar J.F., Himpsel F.J., Hollinger G., Hughes G., Lordan J.L. Phys. Rev. Sci. Instr. 66:1985;2104. [blank_line]