Time-of-flight mass spectroscopy of femtosecond laser ablation of solid surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3343, Issue , 1998, Pages 334-343

  Cavalleri, Andrea ^a,b   Sokolowski Tinten, Klaus ^a   Bialkowski, Jörg ^a   Von Der Linde, Dietrich ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

Ablation; Femtosecond pulses; Knudsen layer theory; Semiconductors; Silcon clusters; Surface temperature measurements; Two phase regime

Indexed keywords

ARSENIC COMPOUNDS; ATMOSPHERIC TEMPERATURE; ATOMS; CRYSTALS; DESORPTION; ELECTRIC CONDUCTIVITY; ELECTROMAGNETIC PULSE; GALLIUM ALLOYS; GALLIUM COMPOUNDS; LASER ABLATION; LASERS; MASS SPECTROMETERS; MASS SPECTROMETRY; NEGATIVE IONS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SEMICONDUCTING GALLIUM; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR LASERS; SEMICONDUCTOR MATERIALS; SURFACE PROPERTIES; TEMPERATURE MEASUREMENT;

FEMTOSECOND PULSES; KNUDSEN LAYER THEORY; SEMICONDUCTORS; SILCON CLUSTERS; SURFACE TEMPERATURE MEASUREMENTS; TWO PHASE REGIME;

ULTRASHORT PULSES;

EID: 0038733922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321541     Document Type: Conference Paper

References (18)

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18. The QMS used in the present experiment is limited to 300 a.m.u. We therefore cannot detect Arsenic molecules with more than 4 atoms.