The effect of pulsed magnetron sputtering on the properties of indium tin oxide thin films

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 29-33

  Hwang, Man Soo ^a   Lee, Hye Jung ^a   Jeong, Heui Seob ^a   Seo, Yong Woon ^a   Kwon, Sang Jik ^b  

^a ITM Inc   (South Korea)

^b Gachon University   (South Korea)

Author keywords

Indium tin oxide; Pulsed magnetron sputtering; Surface morphology; Transparent conducting oxide

Indexed keywords

INDIUM; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PLASTICS; SUBSTRATES;

FLEXIBLE PLASTIC SUBSTRATES;

THIN FILMS;

FILM; INDIUM; MORPHOLOGY; SPUTTERING; TIN OXIDE;

EID: 0038721136     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00231-7     Document Type: Article

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