A single zone azimuth calibration for rotating compensator multichannel ellipsometry

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 5 A, 2003, Pages 2872-2875

  An, Ilsin ^a   Lee, J Jaeho ^a   Bang, Kyoung Yoon ^a   Kim, Ok Kyung ^a   Oh, Hye Keun ^a  

^a Hanyang University   (South Korea)

Author keywords

Calibration; Ellipsometry; Multichannel; Spectroscopic

Indexed keywords

DATA ACQUISITION; DATA REDUCTION; PHOTONS; SPECTROSCOPIC ANALYSIS;

PHOTON ENERGY;

ELLIPSOMETRY;

EID: 0038718986     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2872     Document Type: Article

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