SrTiO3 thin film varactors on Si for microwave applications

Materials Research Society Symposium - Proceedings

Volumn 748, Issue , 2003, Pages 477-482

  Vorobiev, Andrei ^a,b   Rundqvist, Par ^a   Khamchane, Khaled ^a   Gevorgian, Spartak ^a,c  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b INSTITUTE FOR PHYSICS OF MICROSTRUCTURES   (Russian Federation)

^c Ericsson Microwave Systems AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRODES; LASER ABLATION; MICROWAVES; PERMITTIVITY; SILICON; STRONTIUM COMPOUNDS; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

MICROWAVE FREQUENCIES;

VARACTORS;

EID: 0038713609     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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