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Volumn 67-68, Issue , 2003, Pages 720-727
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Metallic air-bridges on non-planar transport structures
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Author keywords
Electron beam lithography; Electron transport; Metallic air bridges; Nanostructures
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Indexed keywords
ELECTRON BEAM LITHOGRAPHY;
ELECTRON TRANSPORT PROPERTIES;
EVAPORATION;
FABRICATION;
NANOSTRUCTURED MATERIALS;
SUBSTRATES;
METALLIC AIR-BRIDGES;
ELECTRON DEVICE MANUFACTURE;
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EID: 0038696460
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-9317(03)00189-8 Document Type: Conference Paper |
Times cited : (6)
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References (9)
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