Sticking probability of sputtered particles and collisions on rotating Ni-P substrates

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 223-227

  Obara, K ^a   Mabuchi, M ^a   Imamura, N ^a   Fujikawa, T ^a   Yamada, T ^a   Terada, N ^a  

^a KAGOSHIMA UNIVERSITY   (Japan)

Author keywords

Collision process; Sputtering; Sticking probability; Super alloy; Surface process

Indexed keywords

ARGON; PROBABILITY; SPUTTERING;

PRIMARY STICKING PROBABILITY;

NICKEL COMPOUNDS;

COATING; PROBABILITY; SPUTTERING; SURFACE TREATMENT;

EID: 0038685890     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00085-9     Document Type: Article

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