Improvement of the furnace annealing process to suppress slip generation in gallium arsenide

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 2 A, 2003, Pages 389-392

  Saito, Yoshihiro ^a   Nakajima, Shigeru ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

AlN; Furnace annealing; GaAs; Simulation; Slipline

Indexed keywords

ANNEALING; COMPUTER SIMULATION; HEAT CONDUCTION; HEAT CONVECTION; HEAT RADIATION; TEMPERATURE; THERMAL STRESS;

COOLING EFFECT; FURNACE ANNEALING PROCESS; SUPPRESS SLIP GENERATION; TEMPERATURE DIFFERENCE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0038682133     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.389     Document Type: Article

References (4)

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4. S. Hirasawa, T. Torii and T. Takagaki: Trans. Jpn. Soc. Mech. Eng. B 55 (1989) 2880 [in Japanese].