SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 426-432, Issue 3, 2003, Pages 2473-2478

On production of nanocrystalline ternary nitride coatings via magnetron sputtering

(3) Wuhrer, R a McCredie, G a Yeung, W Y a

a UNIVERSITY OF TECHNOLOGY SYDNEY (Australia)

Author keywords

Deposition bias voltage; Deposition nitrogen pressure; Magnetron sputtering; Nanocrystalline coatings

Indexed keywords

ELECTRIC POTENTIAL; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MICROHARDNESS; NANOSTRUCTURED MATERIALS; NITROGEN; SUBSTRATES; SURFACE ROUGHNESS; TERNARY SYSTEMS;

BIAS VOLTAGE;

COATINGS;

EID: 0038677460 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.426-432.2473 Document Type: Conference Paper

Times cited : (4)

References (9)

1
- 1542510357
- R.W. Siegel: Nanostructured Mater., Vol. 4 (1994), p.121.
- (1994) Nanostructured Mater. , vol.4 , pp. 121
- Siegel, R.W.¹

2
- 0037658633
- C. Suryanarayana: Int. Mater. Rev., Vol. 40 (1995), p.21.
- (1995) Int. Mater. Rev. , vol.40 , pp. 21
- Suryanarayana, C.¹

3
- 0023435633
- H.A. Jehn, S. Hofmann and W.D. Munz: Thin Solid Films, Vol. 153 (1987), p.45.
- (1987) Thin Solid Films , vol.153 , pp. 45
- Jehn, H.A.¹ Hofmann, S.² Munz, W.D.³

4
- 0025623906
- J.R. Roos, J.P. Celis, E. Vancoille, H. Veltrop, S. Boelens, F. Jungblut, J. Ebberink and H. Homberg: Thin Solid Films, Vol. 193/194 (1990), p.547.
- (1990) Thin Solid Films , vol.193-194 , pp. 547
- Roos, J.R.¹ Celis, J.P.² Vancoille, E.³ Veltrop, H.⁴ Boelens, S.⁵ Jungblut, F.⁶ Ebberink, J.⁷ Homberg, H.⁸

5
- 17144468472
- K. Tonshoff, A. Mohlfeld, T. Leyendecker, H.G. Fub, G. Erkens, R. Wenke, T. Cselle and M. Schwenck: Surf. Coat. Technol., Vol. 94/95 (1997), p.603.
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 603
- Tonshoff, K.¹ Mohlfeld, A.² Leyendecker, T.³ Fub, H.G.⁴ Erkens, G.⁵ Wenke, R.⁶ Cselle, T.⁷ Schwenck, M.⁸

6
- 0037094317
- R. Wuhrer and W.Y. Yeung: J. Mats. Sci., Vol. 37 (2002), p.1993.
- (2002) J. Mats. Sci. , vol.37 , pp. 1993
- Wuhrer, R.¹ Yeung, W.Y.²

7
- 0037103920
- R. Wuhrer and W.Y. Yeung: J. Mats. Sci., Vol. 37 (2002), p.3477.
- (2002) J. Mats. Sci. , vol.37 , pp. 3477
- Wuhrer, R.¹ Yeung, W.Y.²

8
- 0003840273
- McGraw-Hill
- D.L. Smith: Thin Film Deposition: Principles and Practice, McGraw-Hill (1995), p.477.
- (1995) Thin Film Deposition: Principles and Practice , pp. 477
- Smith, D.L.¹

9
- 0038211864
- PhD Thesis, University of Technology Sydney, Australia
- R. Wuhrer: PhD Thesis, University of Technology Sydney, Australia (2001).
- (2001)
- Wuhrer, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.