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Volumn 37, Issue 16, 2002, Pages 3477-3482
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A study on the microstructure and property development of d.c. magnetron co-sputtered ternary titanium aluminium nitride coatings Part II. Effect of magnetron discharge power
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
CRYSTAL MICROSTRUCTURE;
DENSIFICATION;
DEPOSITION;
GRAIN SIZE AND SHAPE;
HARDNESS;
MAGNETRON SPUTTERING;
SURFACE ROUGHNESS;
TITANIUM COMPOUNDS;
MAGNETRON DISCHARGE POWER;
REACTIVE MAGNETRON CO-SPUTTERING TECHNIQUE;
COATINGS;
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EID: 0037103920
PISSN: 00222461
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1016515207089 Document Type: Article |
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Times cited : (12)
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References (7)
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