Effects of additive and impurity species on the oxide morphology of silicon nitride

Journal of Materials Research

Volumn 18, Issue 4, 2003, Pages 878-884

  Tsarenko, I V ^a,b   Du, H ^a   Lee, W Y ^a  

^a Stevens Institute of Technology   (United States)

^b VA Belyi Metal Polymer Research Institute of National Academy of Sciences of Belarus   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL IMPURITIES; LUTETIUM COMPOUNDS; MORPHOLOGY; OXIDATION RESISTANCE; OXIDES; SINTERING; SPALLING;

OXIDATION STABILITY;

SILICON NITRIDE;

EID: 0038676344     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0121     Document Type: Article

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