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Volumn 37, Issue 34, 1998, Pages 8012-8020

Fabrication of N-level binary optical elements by use of M mask patterns with N in the range of 2M − 1 + 1 ≤ N ≤ 2M

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0038591735     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.008012     Document Type: Article
Times cited : (8)

References (15)
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  • 2
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    • Binary optics technology: The theory and design of multilevel diffractive optical elements
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    • G. J. Swanson, “Binary optics technology: the theory and design of multilevel diffractive optical elements, ” MIT Lincoln Laboratory Tech. Rep. No. 854 (Lexington, Mass., 1989).
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    • H. Dammann, “Blazed synthetic phase-only holograms, ” Optik 31, 95-104 (1970).
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  • 5
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    • Binary optics technology: Theoretical limits on the diffraction efficiency of multilevel diffractive optical elements
    • Lexington, Mass
    • G. J. Swanson, “Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive optical elements, ” MIT Lincoln Laboratory Tech. Rep. No. 914 (Lexington, Mass., 1991).
    • (1991) MIT Lincoln Laboratory Tech. Rep , vol.914
    • Swanson, G.J.1
  • 6
    • 0020192359 scopus 로고
    • Diffraction analysis of surface-relief gratings
    • M. G. Moharam and T. K. Gaylord, “Diffraction analysis of surface-relief gratings, ” J. Opt. Soc. Am. 72, 1385-1392 (1982).
    • (1982) J. Opt. Soc. Am. , vol.72 , pp. 1385-1392
    • Moharam, M.G.1    Gaylord, T.K.2
  • 7
    • 0028460004 scopus 로고
    • Limits of scalar diffraction theory for diffractive phase elements
    • D. A. Pommet, M. G. Moharam, and E. B. Grann, “Limits of scalar diffraction theory for diffractive phase elements, ” J. Opt. Soc. Am. A 11, 1827-1834 (1994).
    • (1994) J. Opt. Soc. Am. A , vol.11 , pp. 1827-1834
    • Pommet, D.A.1    Moharam, M.G.2    Grann, E.B.3
  • 11
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    • Effect of VLSI fabrication errors on kinoform efficiency
    • I. N. Cindrich and S. H. Lee, eds., Proc. SPIE. 1211
    • M. W. Farn and J. W. Goodman, “Effect of VLSI fabrication errors on kinoform efficiency, ” in Computer and Optically Formed Holographic Optics, I. N. Cindrich and S. H. Lee, eds., Proc. SPIE. 1211, 125-136 (1990).
    • (1990) Computer and Optically Formed Holographic Optics , pp. 125-136
    • Farn, M.W.1    Goodman, J.W.2
  • 12
    • 0012452855 scopus 로고    scopus 로고
    • Point-spread function for binary diffractive lenses fabricated with misaligned masks
    • Y. Unno, “Point-spread function for binary diffractive lenses fabricated with misaligned masks, ” Appl. Opt. 37, 3401-3407 (1998).
    • (1998) Appl. Opt. , vol.37 , pp. 3401-3407
    • Unno, Y.1
  • 14
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    • Theoretical models for the optical alignment of wafer steppers
    • H. L. Stover, ed., Proc. SPIE. 772
    • C. P. Kirk, “Theoretical models for the optical alignment of wafer steppers, ” in Optical Microlithography VI, H. L. Stover, ed., Proc. SPIE. 772, 134-141 (1987).
    • (1987) Optical Microlithography VI , pp. 134-141
    • Kirk, C.P.1
  • 15
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    • Gaussian random variables
    • Wiley, New York, Chap. 2.7
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    • Goodman, J.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.