Generation of ammonia plasma using a helical antenna and nitridation of GaAs surface

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 619-624

  Yasui, Kanji ^a   Arayama, Tatsuro ^a   Okutani, Satoshi ^a   Akahane, Tadashi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

GaAs surface; Nitridation; Surface composition

Indexed keywords

AMMONIA; ELLIPSOMETRY; EMISSION SPECTROSCOPY; HELICAL ANTENNAS; PLASMAS; SURFACE STRUCTURE;

MAGNETIC COILS;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0038579451     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00135-1     Document Type: Conference Paper

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