MgB2 thin film fabrication by rf magnetron sputtering

Physica C: Superconductivity and its Applications

Volumn 388-389, Issue , 2003, Pages 115-116

  Mori, Zon ^a   Eitoku, Koji ^b   Doi, Toshiya ^b   Koba, Shin Ichiro ^a   Hakuraku, Yoshinori ^b  

^a KUMAMOTO NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b KAGOSHIMA UNIVERSITY   (Japan)

Author keywords

MgB2 thin film; Oxidation of Mg; rf magnetron sputtering

Indexed keywords

ANNEALING; ARGON; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; OXIDATION; SINTERING; SUPERCONDUCTING MATERIALS;

COHERENCE LENGTH;

THIN FILMS;

EID: 0038527314     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4534(02)02675-8     Document Type: Conference Paper

References (4)

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