As-grown deposition of superconducting MgB2 thin films by multiple-target sputtering system

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 2 A, 2002, Pages

  Saito, Atsushi ^a   Kawakami, Akira ^a   Shimakage, Hisashi ^a   Wang, Zhen ^a  

^a NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

Author keywords

B; Critical temperatures; Mg; MgB2 thin films; Multiple target sputtering system

Indexed keywords

CRYSTALLINE MATERIALS; GRAIN SIZE AND SHAPE; ION BEAMS; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; MOLECULAR BEAM EPITAXY; SUBSTRATES; SUPERCONDUCTING MATERIALS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY SPECTROMETERS;

MULTIPLE-TARGET SPUTTERING SYSTEM;

FILM GROWTH;

EID: 0036478647     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.L127     Document Type: Article

References (6)