A study of AlN films prepared by arc ion plating

Journal of Materials Science and Technology

Volumn 19, Issue 1, 2003, Pages 27-29

  Huang, Meidong ^a   Lu, Chunyan ^a   Wang, Bing ^a   Sun, Chao ^a   Huang, Rongfang ^a   Wen, Lishi ^a   Lin, Guoqiang ^b   Dong, Chuang ^b  

^a INSTITUTE OF METAL RESEARCH   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

AIP; AlN; Bias; Preferential orientation

Indexed keywords

MECHANISMS; PLATING; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ADHESION STRENGTH; ARC ION PLATING; BIAS; PREFERENTIAL ORIENTATION;

FILMS;

EID: 0038506358     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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