Acoustic heating and thermometry in microfluidic channels

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 474-477

  Jagannathan, H ^a   Yaralioglu, G G ^a   Ergun, A S ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; CHANNEL FLOW; HEATING; TEMPERATURE CONTROL; TEMPERATURE MEASUREMENT; ULTRASONIC APPLICATIONS; ULTRASONIC TRANSDUCERS;

ACOUSTIC ENERGY; ACOUSTIC HEATING; MICROFLUIDIC CHANNELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038494081     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. C. Liu, J. Huang, Z. Zhu, F. Jiang, S. Tung, Y. Tai, C. Ho, "A Micomachined Flow Shear-Stress Sensor Based on Thermal Transfer Principles," J. Micromechanical Systems, Vol. 8, 1999, pp 90-99.
2. H. Jagannathan, G.G. Yaralioglu, A.S. Ergun, F.L. Degertekin, and B.T. Khuri-Yakub, "Micro-Fluidic Channels with Integrated Ultrasonic Transducers," in Proc. IEEE Ultrason. Symp., pp.859-862, Atlanta, USA, 2001
3. B.T. Khuri-Yakub, J. G. Smits, and T. Barbee, "Reactive Magnetron Sputtering of ZnO," J. Appl. Phys. 52, pp. 4772-4774, July 1981.
4. M. I. Haller, and B. T. Khuri-Yakub, "A surface micromachined electrostatic air transducer," in Proc. IEEE Ultrason. Symp., pp.1241-1244, Cannes, France, 1994
5. V.A. Del Grosso and C.W. Mader, "Speed of sound in pure water," J. Acoust. Soc. Am., 52(2), pp 1442-1446, 1972.
6. W. Marczak, "Water as a standard in the measurements of speed of sound in liquids," J. Acoust. Soc. Am., 102(5), pp 2776-2779, 1997.