Tribological characteristics of highly wear-durable ECR-sputtered carbon film

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 274-276

  Yajima, T ^a   Umemura, S ^a   Hirono, S ^b   Imoto, A ^c   Kaneko, R ^d  

^a CHIBA INSTITUTE OF TECHNOLOGY   (Japan)

^b NTT CORPORATION   (Japan)

^c TOKYO UNIVERSITY OF TECHNOLOGY   (Japan)

^d WAKAYAMA UNIVERSITY   (Japan)

Author keywords

Atomic force microscopy; Carbon; ECR sputtering; Internal stress; Two layer film; Wear

Indexed keywords

CARBON; DURABILITY; STRESS ANALYSIS; TRIBOLOGY; WEAR OF MATERIALS;

TRIBOLOGICAL CHARACTERISTICS;

AMORPHOUS FILMS;

CARBON; COATING; FILM; SURFACE TREATMENT; TRIBOLOGY; WEAR RESISTANCE;

EID: 0038469709     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00048-3     Document Type: Article

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