Determination of the mechanical properties of thin polyimide films deposited on a GaAs substrate by bulging and nanoindentation tests

Materials Science and Engineering: A

Volumn 262, Issue 1-2, 1999, Pages 101-106

  Poilane, C ^a   Delobelle, P ^a   Bornier, L ^a   Mounaix, P ^b   Melique, X ^b   Lippens, D ^b  

^a FEMTO ST INSTITUTE   (France)

^b UNIV LILLE   (France)

Author keywords

Bulging test; Mechanical properties; Nanoindentation test; Polyimide; Thin film

Indexed keywords

DEPOSITION; ELASTIC MODULI; MECHANICAL PROPERTIES; MECHANICAL TESTING; MEMBRANES; POLYIMIDES; SEMICONDUCTING GALLIUM ARSENIDE; TENSILE STRESS; THICKNESS MEASUREMENT;

BULGING TEST; NANOINDENTATION TESTS;

THIN FILMS;

EID: 0038468580     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(98)01002-8     Document Type: Article

References (10)

1. [1] D.A. Hardwick, Thin Solid Films 154 (1987) 109.
2. [2] J.H. Jou, Hsu Li, J. Appl. Phys. 69 (3) (1991) 1384.
3. [3] P. Salzenstein, O. Dupuis, M. Helal, et al., Electr. Lett. 32 (1996) 821.
4. [4] M.K. Small, W.D. Nix, J. Mater. Res. 7 (6) (1992) 1553.
5. [5] E. Bonnette, P. Delobelle, L. Bornier, B. Trolard, G. Tribillon, J. Mater. Res. 12 (9) (1997) 2234.
6. [6] G.M. Allen, M. Mehrengani, R.T. Howe, S.D. Senturia, Appl. Phys. Lett. 51 (4) (1987) 241.
7. [7] W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (6) (1992) 1564.
8. [8] P. Mounaix, P. Delobelle, X. Melique, L. Bornier, D. Lippens, Mater. Sci. Eng. B 51 (1998) 258.
9. [9] A. Sergent, C. Poilane, L. Robert, P. Delobelle, J. Phys. IV France 8 (1998) 259.
10. [10] A.K. Bhattacharya, W.D. Nix, Int. J. Solids Struct. 24 (12) (1988) 1287.