Effects of silicon tetrachloride concentration on nanocrystalline silicon films growth

Thin Solid Films

Volumn 437, Issue 1-2, 2003, Pages 45-50

  Wong, Te Chi ^a   Wu, Jih Jen ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Chemical vapor deposition; Nanostructures; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; SILICON; SILICON COMPOUNDS;

SILICON FILMS;

THIN FILMS;

EID: 0038448129     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00620-5     Document Type: Article

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