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Volumn 50, Issue 12, 2001, Pages 1335-1342
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Evaluation of fracture strength and interfacial strength of sputtered TiN and AlN films on titanium substrate
a
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Author keywords
Film strength; Interfacial fracture toughness; Sputtered AlN film; Sputtered TiN film
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Indexed keywords
ALUMINUM NITRIDE;
EXTRAPOLATION;
FRACTURE TOUGHNESS;
INTERFACES (MATERIALS);
MAGNETRON SPUTTERING;
PLASTIC DEFORMATION;
STRENGTH OF MATERIALS;
SUBSTRATES;
TENSILE TESTING;
TITANIUM NITRIDE;
FILM STRENGTH;
INTERFACIAL STRENGTH;
SPUTTERED ALUMINUM NITRIDE FILM;
SPUTTERED TITANIUM NITRIDE FILM;
SEMICONDUCTING FILMS;
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EID: 0035721289
PISSN: 05145163
EISSN: None
Source Type: Journal
DOI: 10.2472/jsms.50.1335 Document Type: Article |
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Times cited : (13)
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References (18)
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