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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3964-3968

Initial results from an extreme ultraviolet interferometer operating with a compact laser plasma source

(7) Ray Chaudhuri, A K a Krenz, K D a Nissen, R P a Haney, S J a Fields, C H b Sweatt, W C c MacDowell, A A d

a SANDIA NATIONAL LABORATORIES (United States)

b UNIVERSITY OF CALIFORNIA (United States)

c SANDIA NATIONAL LABORATORIES (United States)

d BROOKHAVEN NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038434053 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.588624 Document Type: Article

Times cited : (13)

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