Regular step arrays on silicon

Applied Physics Letters

Volumn 72, Issue 8, 1998, Pages 948-950

  Viernow, J ^a   Lin, J L ^a   Petrovykh, D Y ^a   Leibsle, F M ^a   Men, F K ^a   Himpsel, F J ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038419230     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120882     Document Type: Article

References (25)

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