Preparation and characterization of amorphous GaF3 and GaF3-BaF2 thin films by ECR microwave plasma-enhanced CVD

Thin Solid Films

Volumn 429, Issue 1-2, 2003, Pages 28-33

  Takahashi, Shuhei ^a   Shojiya, Masanori ^a   Kawamoto, Yoji ^a   Konishi, Akio ^b  

^a KOBE UNIVERSITY   (Japan)

^b Nihon Yamamura Glass Co Ltd   (Japan)

Author keywords

Amorphous materials; CVD; Fluorides; Optical waveguides

Indexed keywords

AMORPHOUS MATERIALS; ELECTRON CYCLOTRON RESONANCE; FILM PREPARATION; GALLIUM COMPOUNDS; LIGHT PROPAGATION; OPTICAL WAVEGUIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SINGLE CRYSTALS;

PLANAR LIGHTWAVE CIRCUITS;

THIN FILMS;

EID: 0038374890     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01096-9     Document Type: Article

References (26)

1. Kawanishi S., Hattori K., Takara H., Oguma M., Kamatani O., Hibino Y. Electron. Lett. 31:1995;363.
2. Hattori K., Kitagawa T., Shuto K., Oguma M., Ohmori Y. Mater. Sci. Eng. B. 54:1998;15.
3. Josse E., Fonteneau G., Lucas J. Mater. Res. Bull. 32:1997;1139.
4. Jacoboni C., Perrot O., Boulard B. J. Non-Cryst. Solids. 184:1995;184.
5. Jacquier B., Joubert M.F., Remillieux A., Mugnier J., Boulard B., Perrot O., Jacoboni C. J. Non-Cryst. Solids. 184:1995;341.
6. Gao Y., Perrot O., Boulard B., Broquin J.E., Rimet R., Jacoboni C. J. Non-Cryst. Solids. 213-214:1997;137.
7. Lucas M., Garapon C., Lebrasseur E., Mugnier J., Jacquier B., Perrot O., Boulard B., Jacoboni C., Josse E., Adam J.L., Fonteneau G., Lucas J., Broquin J.E., Rimet R. J. Lumin. 72-74:1997;137.
8. Xie W.X., Bernage P., Ramecourt D., Douay M., Taunay T., Niay P., Boulard B., Gao Y., Jacoboni C., Dacosta A., Poignant H., Monerie M. Opt. Commun. 134:1997;36.
9. Lucas M., Garapon C., Jacquier B., Mugnier J., Fezza O., Perrot O., Boulard B., Jacoboni C. Opt. Mater. 10:1998;19.
10. A. Sarhangi, D.A. Thompson, Extended Abstracts of Fourth International Symposium on Halide Glasses, Monterey, CA, 1987, p. 274.
11. Fujiura K., Nishida Y., Kobayashi K., Takahashi S. Jpn. J. Appl. Phys. 30:1991;L1498.
12. Fujiura K., Nishida Y., Kobayashi K., Takahashi S. Jpn. J. Appl. Phys. 30:1991;L2113.
13. Kawamoto Y., Kanno R., Konishi A. J. Mater. Sci. 33:1998;5607.
14. Shimada T., Nishida Y., Kobayashi K., Kanamori T., Oikawa K., Yamada M., Ohishi Y. Electron. Lett. 33:1997;1972.
15. Nishida Y., Kanamori T., Ohishi Y., Yamada M., Kobayashi K., Sudo S. IEEE Photon. Technol. Lett. 9:1997;318.
16. Isshiki K., Kubota M., Kuze Y., Yamaguchi S., Watanabe H., Kasahara K. IEEE Photon. Technol. Lett. 10:1998;1112.
17. Tanabe S., Takahara K., Takahashi M., Kawamoto Y. J. Opt. Soc. Am. B. 12:1995;786.
18. Shojiya M., Kawamoto Y., Konishi A., Wakabayashi H. Thin Solid Films. 358:2000;98.
19. Shojiya M., Takahashi S., Teramoto M., Konishi A., Kawamoto Y. J. Non-Cryst. Solids. 284:2001;153.
20. Tien P.K., Ulrich R., Martin R.J. Appl. Phys. Lett. 14:1969;291.
21. Tien P.K. Appl. Opt. 10:1971;2395.
22. Ulrich R., Torge R. Appl. Opt. 12:1973;2901.
23. Nakamoto K. Infrared and Raman Spectra of Inorganic and Coordination Compounds. Part II. third ed. 1978;Wiley, New York.
24. A. Konishi, Ph.D. Thesis, Kobe University, 1997 (in Japanese).
25. Denham P., Field G.R., Morse P.L.R., Wilkinson G.R. Proc. R. Soc. Lond. A. 317:1970;55.
26. Okamoto K. Fundamentals of Optical Waveguides. 2000;Academic Press, San Diego. Chapter 2.