Preparation of amorphous fluoride films by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Journal of Non-Crystalline Solids

Volumn 284, Issue 1-3, 2001, Pages 153-159

  Shojiya, Masanori ^a   Takahashi, Shuhei ^a   Teramoto, Miyuki ^b   Konishi, Akio ^c   Kawamoto, Yoji ^a  

^a Kobe University   (Japan)

^b Konica Corporation   (Japan)

^c Nihon Yamamura Glass Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CALCIUM COMPOUNDS; CRYSTAL ORIENTATION; ELECTRON CYCLOTRON RESONANCE; FILM PREPARATION; FLUORINE COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); ZINC COMPOUNDS;

ALUMINUM FLUORIDE; CALCIUM FLUORIDE; ZINC FLUORIDE;

AMORPHOUS FILMS;

EID: 0035338386     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00395-7     Document Type: Article

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