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Volumn 743, Issue , 2002, Pages 67-72
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Study on chemical treatment and high temperature nitridation of sapphire for III-nitride heteroepitaxial growth
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Author keywords
[No Author keywords available]
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Indexed keywords
CHARACTERIZATION;
COMPOSITION EFFECTS;
EPITAXIAL GROWTH;
ETCHING;
HETEROJUNCTIONS;
HIGH TEMPERATURE OPERATIONS;
MORPHOLOGY;
NITRIDING;
NITROGEN;
PHASE TRANSITIONS;
SAPPHIRE;
SURFACES;
HETEROEPITAXIAL GROWTH;
HIGH TEMPERATURE NITRIDATION;
WET CHEMICAL ETCHING;
NITRIDES;
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EID: 0038372943
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-743-l3.4 Document Type: Conference Paper |
Times cited : (2)
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References (11)
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