An advanced defect-monitoring test structure for electrical measurements and defect localization

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2003, Pages 47-52

  Hamamura, Yuichi ^a   Kumazawa, Takayuki ^a   Tsunokuni, Kazuyuki ^a   Sugimoto, Aritoshi ^a   Asakura, Hisao ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; INTEGRATED CIRCUIT TESTING; LSI CIRCUITS; SCANNING ELECTRON MICROSCOPY; STRUCTURAL DESIGN;

TEST STRUCTURES;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0038303617     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/icmts.2003.1197372     Document Type: Conference Paper

References (11)

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