Direct-write planar microultracapacitors by laser engineering

Journal of the Electrochemical Society

Volumn 150, Issue 5, 2003, Pages

  Arnold, Craig B ^a   Wartena, Ryan C ^b   Swider Lyons, Karen E ^b   Pique, Alberto ^a  

^a Electronics Sci and Technol Div   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC CURRENTS; ELECTRIC LOSSES; ELECTROCHEMICAL ELECTRODES; LASER APPLICATIONS; MATHEMATICAL MODELS; MICROMACHINING; RUTHENIUM COMPOUNDS; SULFURIC ACID;

DISCHARGE CURRENT; LASER DIRECT WRITE PROCESS; MICROULTRACAPACITORS; OHMIC LOSSES; RUTHENIUM OXIDE; ULTRAVIOLET LASER MICROMACHINING;

ELECTROLYTIC CAPACITORS;

EID: 0038178250     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1563650     Document Type: Article

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