Manufacturing of 3D microstructures using novel UPSAMS process (ultra precision manufacturing of self-assembled micro systems)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 542-545

  Sharon, André ^a   Bilsing, Axel ^a   Lewis, Gordon ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MICROMACHINING; MICROSTRUCTURE; SELF ASSEMBLY;

ULTRA PRECISION MANUFACTURING SELF ASSEMBLED MICROSYSTEMS; ULTRAPRECISION MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0038155501     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Weck, M., Fischers, S., Vos, M., "Fabrication of Microcomponents Using Ultraprecision Machine Tools", Nanotechnology, (8): 145-148, 1997