Focused Ion Beam (FIB) nano-machining and FIB moiré technique for strain analysis in MEMS/NEMS structures and devices

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 674-677

  Li, Biao ^a,b   Tang, Xiaosong ^c   Xie, Huimin ^a   Zhang, Xin ^b  

^a State University of New York   (United States)

^b BOSTON UNIVERSITY   (United States)

^c Inst of Mat Res and Engineering ^*  (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CRYSTAL MICROSTRUCTURE; DEPOSITION; ETCHING; ION BEAMS; POLYSILICON; RESIDUAL STRESSES; SILICA; STRAIN; STRESS ANALYSIS; SUBSTRATES; THIN FILMS;

FOCUSED ION BEAM; NANOMACHINING; STRAIN ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038155443     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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