Identification of hydrogen related defects in proton implanted float-zone silicon

EPJ Applied Physics

Volumn 23, Issue 1, 2003, Pages 5-9

  Leveque P ^a   Hallen A ^a   Svensson, B G ^a,b   Wong Leung, J ^c   Jagadish, C ^c   Privitera, V ^d  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF OSLO   (Norway)

^c AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^d CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BAND STRUCTURE; CRYSTAL DEFECTS; DEEP LEVEL TRANSIENT SPECTROSCOPY; HYDROGEN; ION IMPLANTATION; PROTONS;

CONDUCT ION BAND EDGE; FLOAT ZONE SILICON; HYDROGEN RELATED DEFECTS; PROTON IMPLANTION; VACANCY OXYGEN;

SEMICONDUCTING SILICON;

EID: 0038115176     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2002113     Document Type: Article

References (19)

1. A. Mogro-Campero, R.P. Love, M.F. Chang, R.F. Dyer, IEEE Trans. Electron. Devices 33, 1667 (1986)
2. D.C. Sawko, J. Bartko, IEEE Nucl. Sci. 30, 1756 (1983)
3. D.V. Lang, J. Appl. Phys. 45, 3023 (1974)
4. K. Bonde Nielsen, L. Dobaczewski, K. Goscinski, R. Bendesen, O. Andersen, B. Bech Nielsen, Physica B 273-274, 167 (1999)
5. P. Lévêque, P. Pellegrino, A. Hallén, B.G. Svensson, V. Privitera, Nucl. Instrum. Methods B 174, 297 (2001)
6. J.P. Biersack, L.G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980)
7. J.F. Ziegler, J.P. Biersack, U. Littmark, in The Stopping and Range of Ions in Solids, edited by J.F. Ziegler (Pergamon, New York, 1985), Vol. 1
8. A. Hallén, P.A. Ingermarsson, P. Håkansson, G. Possnert, B.U.R. Sundqvist, Nucl. Instrum. Methods B 36, 345 (1989)
9. B.G. Svensson, K.-H. Rydén, B.M.S. Lewerentz, J. Appl. Phys. 66, 1699 (1989)
10. L.C. Kimerling, in Radiation Effects in Semiconductors, edited by N.B. Urli, J.W. Corbett (Inst. Phys. Conf. Ser., 31 1977), p. 221
11. B.G. Svensson, M. Willander, J. Appl. Phys. 62, 2758 (1987)
12. A.O. Evwaraye, E. Sun, J. Appl. Phys. 47, 3776 (1976)
13. G.D. Watkins, J.W. Corbett, Phys. Rev. 121, 1001 (1961)
14. J.W. Corbett, G.D. Watkins, R.M. Chrenko, R.S. McDonald, ibid. 121, 1015 (1961)
15. L.W. Song, X.D. Zhan, B.W. Benson, G.D. Watkins, Phys. Rev. B 42, 5765 (1990)
16. B.G. Svensson, A. Hallén, B.U.R. Sundqvist, Mater. Sci. Eng. B 4, 285 (1989)
17. A. Hallén, B.U.R. Sundqvist, Z. Paska, B.G. Svensson, M. Rosling, J. Tirén, J. Appl. Phys. 67, 1266 (1990)
18. B.G. Svensson, B. Mohadjeri, A. Hallén, J.H. Svensson J.W. Corbett, Phys. Rev. B 43, 2292 (1991)
19. J.W. Corbett, J.L. Lindstrm, S.J. Pearton, MRS Symp. Proc. 104, 229 (1988) and references therein