A hierarchical approach to production control of reentrant semiconductor manufacturing lines

IEEE Transactions on Control Systems Technology

Volumn 11, Issue 4, 2003, Pages 578-587

  Vargas Villamil, Felipe D ^a   Rivera, Daniel E ^b   Kempf, Karl G ^c  

^a INSTITUTO MEXICANO DEL PETRÓLEO   (Mexico)

^b Arizona State University   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Discrete event system; Hierarchical structure; Model predictive control (MPC); Reentrant manufacturing line; Scheduling; Semiconductor fabrication

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; DISCRETE TIME CONTROL SYSTEMS; DISTRIBUTED PARAMETER CONTROL SYSTEMS; INVENTORY CONTROL; PARAMETER ESTIMATION; PREDICTIVE CONTROL SYSTEMS; PRODUCTION CONTROL; SCADA SYSTEMS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

AGGREGATED SUPERVISORY CONTROL; MODEL PREDICTIVE CONTROL; REENTRANT SEMICONDUCTOR MANUFACTURING LINE; SHOP-FLOOR CONTROL;

HIERARCHICAL SYSTEMS;

EID: 0038105030     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2003.813368     Document Type: Article

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