Hollow metallic micromachined needle arrays

Biomedical Microdevices

Volumn 2, Issue 3, 2000, Pages 197-205

  Brazzle, John D ^a   Papautsky, Ian ^a   Frazier, A Bruno ^b  

^a Department of Electrical and Computer Engineering   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Drug delivery; Microelectrodeposition; Microfluidics; Micromachining; Microneedles

Indexed keywords

EID: 0038029170     PISSN: 13872176     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (29)

1. M. Boillat, B. Schoot, P. Arquint, and N. Rooij, "Controlled liquid dosing in micro-instruments," in Proc SPIE Micro Fluidic Devices and Systems (Santa Clara, CA, 1999) Sep. 20-21, pp. 20-27.
2. M.A. Burns, B.M. Johnson, S.N. Brahmasandra, K. Handique, J.R. Webster, M. Krishnan, T.S. Sammarco, P.F. Mann, D.K. Jones, D. Heldsinger, C.H. Mastrangelo, and D.T. Burke, Science 282, 484-487 (1998).
3. D.J. Harrison, C. Skinner, S.B. Cheng, G. Ocvirk, S. Attiya, N. Bings, C. Wang, J. Li, P. Thibault, and W Lee, "From micro-motors to micro-fluidics the blossoming of micromachining technologies in chemistry, biochemistry, and biology," in Proc Transducers '99 (Sendai, Japan, 1999) June 7-10, pp. 12-15.
4. J.W. Choi, S. Bhansali, C.H. Ahn, and H.T. Henderson, "A new magnetic bead-based filterless bio-separator for integrated bio-molecule detection systems," in Proc Eurosensors XIII (Netherlands, September, 1999).
5. B.K. Gale, A.B. Frazier, and K. Caldwell, "A micromachined electrical field-flow fractionation (u-EFFF) system," IEEE Trans Biomed Eng 45(12), 1459-1469 (1998).
6. J. Chen and K.D. Wise, "A multipchannels neural probe for selective chemical delivery at the cellular level," in Tech Dig IEEE Solid-State Sensor and Actuator Workshop (Hilton Head, SC, 1994), June 13-16, pp. 256-259.
7. L. Lin and A.P. Pisano, "Silicon-processed microneedles," in IEEE J Microelectromech Sys 8(1), 78-84 (1999).
8. N.H. Talbot and A.P. Pisano, "Polymolding two wafer polysilicon micromolding of closed-flow passages for microneedles and microfluidic devices," in Tech Dig Solid-State Sensor and Actuator Workshop (Hilton Head, SC, 1998), June 8-11, pp. 265-268.
9. D.V. McAllister, F. Gros, S.P. Davis, L.M. Matta, M.R. Prausnitz, and M.G. Allen, "3-dimensional hollow microneedle and microtube arrays," in Proc Transducers '99 (Sendai, Japan, 1999), June 7-10, pp. 1098-1101.
10. United States Patent, Patent Number 5,876,582.
11. John D. Brazzle, Ian Papautsky, and A.Bruno Frazier, "Fluid-coupled metallic microfabricated needle arrays," in Proc SPIE Micro Fluidic Devices and Systems (Santa Clara, CA, 1998), Sep. 21-24, pp. 116-124.
12. I. Paputsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, "A low temperature, IC compatable process for fabricating surface micromachined metallic microchannels", in IEEE J Microelectromech Sys 7(2), 267-273 (1998).
13. I. Paputsky, J. Brazzle, H. Swerdlow, and A.B. Frazier, "Micromachined pipette arrays," in IEEE Engineering in Medicine and Biology Society Conf (Chicago, IL, 1997) Oct 30-Nov 2.
14. H. Schlichting, Boundary Layer Theory 7th ed (McGraw-Hill, New York, NY, 1979).
15. F.M. White, Viscous Fluid Flow 2nd ed (McGraw Hill, New York, NY, 1991).
16. F.M. White, Fluid Mechanics 3rd ed (McGraw Hill, New York, NY 1994).
17. R.W. Fox and A.T. McDonald, Introduction to Fluid Mechanics 3rd ed (John Wiley and Sons, New York, NY, 1985).
18. R.L. Panton, Incompressible Flow 2nd ed (John Wiley and Sons, New York, NY, 1996).
19. D.J. Elliot, Integrated circuit fabrication technology (McGraw-Hill, New York, NY, 1982).
20. R.A. Colclaser, Microelectronics processing and device design (John Wiley & Sons, New York, NY, 1980).
21. H. Siedel, L. Csepregi, and A. Heuberger, "Anisotropic etching of crystalline silicon in alkaline solutions", J Electrochem Soc 37, 3612-3620 (1990).
22. I. Kadija, V. Chinchankar, V.T. Eckert, E.J. Kudrak, and J. Abys, "Electroplating of thick and ductile palladium A new electroplating technology", Proc of the 77th Annual Conference of the American Electroplaters and Surface Finishers Society July (1990).
23. S.D. Cramer and D. Schlain, "Electrodeposition of palladium and platinum from aqueous electrolytes," Plating May, 516-522 (1969).
24. E.J. Kudrak, J.A. Abys, H.K. Straschil, I. Kadija, and J.J. Maisano, "Palladium and palladium alloy plating for the 90's," presented at Connectors '93 (East Midlands, England, May 19, 1993).
25. J. Black, Biological performance of materials Fundamentals of biocompatablity (Marcel Dekker, New York, NY, 1992).
26. W.H. Safranek, The Properties of Electrodeposited Metals and Alloys (Elsevier, New York, NY, 1974).
27. J.K. Dennis and T.E. Such, Nickel and Chromium Plating 3rd ed (Cambridge, U.K. Woodhead, 1993).
28. J.M. Gere and S.P. Timoshenko, Mechanics of Materials (PWS-Kent Publishing Company, Boston, 1990).
29. Ian Papautsky, John Brazzle, Timothy Ameel, and A. Bruno Frazier, "Laminar fluid behavior in microchannels using micropolar fluid theory," Sensors and Actuators 73(2), 101-108 (1999).