Single-step nanopatterning with a non-contact scanning force microscope by electrically induced local chemical vapour deposition

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 696-701

  Croitoru, M D ^a   Hochst A ^a   Bertsche, G ^a   Krauss S ^a   Roth, S ^b   Kern, D P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

Author keywords

Carbon nanotubes contact; Local CVD; Non contact scanning force microscope; Single step additive process

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRODES; MICROSCOPIC EXAMINATION; ORGANOMETALLICS; SUBSTRATES;

SCANNING FORCE MICROSCOPY (SFM);

ELECTRIC CONTACTS;

EID: 0038020124     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00131-X     Document Type: Conference Paper

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