Fluidic self-assembly of silicon microstructures

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 1995, Pages 1263-1268

  Verma, Ashish K ^a   Hadley, Mark A ^a   Yeh, Hsi Jen J ^a   Smith, J S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL MICROSTRUCTURE; DISSIMILAR MATERIALS; ETCHING; MATHEMATICAL MODELS; OPTIMIZATION; SUBSTRATES;

FLUIDIC SELF-ASSEMBLY; SILICON MICROSTRUCTURES;

SEMICONDUCTING SILICON;

EID: 0029227466     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)